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Title: 3D vertical integration technologies for advanced semiconductor radiation sensors and readout electronics
Permalink: http://hdl.handle.net/10446/25302

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RE_IWASI_2011.pdfpublisher's version - versione dell'editore216.87 kBAdobe PDFView/Open

Suggested citation: RE, VALERIO, (2011). 3D vertical integration technologies for advanced semiconductor radiation sensors and readout electronics. Advances in Sensors and Interfaces (IWASI), 2011 4th IEEE International Workshop on (pp.33-36). doi: 10.1109/IWASI.2011.6004681. Retrieved from http://hdl.handle.net/10446/25302
Author⁄s: RE, VALERIO
Type of content: conference presentation - intervento a convegno
Language: eng
DOI: 10.1109/IWASI.2011.6004681
Conference/Workshop: 2011 4th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI)
Conference n.: 4th
Conference place: Borgo Egnazia Savelletri di Fasano, Brindisi, Italy
Conference date: 28-29 June 2011
Is part of: Advances in Sensors and Interfaces (IWASI), 2011 4th IEEE International Workshop on
From p. : 33
to p. : 36
Date issued: 2011
Abstract: The development of 3D vertical integration in the microelectronic industry brings along significant advantages for pixelated semiconductor radiation sensors in cutting-edge scientific experiments at high luminosity particle accelerators and advanced X-ray sources. These applications set very demanding requirements on the performance of sensors and their readout electronics, in terms of pixel pitch, radiation tolerance, signal-to-noise ratio and capability of handling very high data rates. 3D vertical integration of two or more layers with sensors and CMOS devices naturally leads the designer towards extending pixel-level processing functionalities and achieving novel structures where each layer is optimized for a specific function. This paper reviews the efforts towards the development of novel vertically integrated pixel sensors and discusses the challenges that are being tackled to qualify these devices for actual applications.
In:Contributions in conference proceedings - Contributi in atti di convegno


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