Silicon-based microplatforms for characterization of nanostructured layers with application in intermediate temperature micro solid oxide fuel cells

The present work is devoted to study the development of yttria-stabilized zirconia membranes self-supported on silicon-based microplatforms, to be used as electrolytes on micro solid oxide fuel cells. The microfabrication process to obtain yttria-stabilized zirconia membranes is detailed, and some key aspects for the integration of yttria-stabilized zirconia films deposited by pulsed laser deposition on the silicon-based microplatform are shown. Moreover, the effect on the thermomechanical stability of different fabrication parameters is presented, as well as the way to control the pinhole generation on the membranes. Finally, some electrical characterization guidelines are included, in order to study the effects of the platform and the membrane dimensions on the different measurements performed. © 2010 Materials Research Society.