In the design of the Silicon Vertex Tracker for the high luminosity SuperB collider, very challenging requirements are set by physics and background conditions on its innermost Layer0: small radius (about 1.5 cm), resolution of 10–15um in both coordinates, low material budget <1%X0, and the ability to withstand a background hit rate of several tens of MHz/cm2. Thanks to an intense R&D program the development of Deep NWell CMOS MAPS (with the ST Microelectronics 130 nm process) has reached a good level of maturity and allowed for the first time the implementation of thin CMOS sensors with similar functionalities as in hybrid pixels, such as pixel-level sparsification and fast time stamping. Further MAPS performance improvements are currently under investigation with two different approaches: the INMAPS CMOS process, featuring a quadruple well and a high resistivity substrate, and 3D CMOS MAPS, realized with vertical integration technology. In both cases specific features of the processes chosen can improve charge collection efficiency, with respect to a standard DNW MAPS design, and allow to implement a more complex in-pixel logic in order to develop a faster readout architecture. Prototypes of MAPS matrix, suitable for application in the SuperB Layer0, have been realized with the INMAPS 180 nm process and the 130 nm Chartered/Tezzaron 3D process and results of their characterization will be presented in this paper.

Recent developments on CMOS MAPS for the SuperB Silicon Vertex Tracker

COMOTTI, Daniele;MANGHISONI, Massimo;RE, Valerio;TRAVERSI, Gianluca;GAIONI, Luigi;QUARTIERI, Emanuele;
2013-01-01

Abstract

In the design of the Silicon Vertex Tracker for the high luminosity SuperB collider, very challenging requirements are set by physics and background conditions on its innermost Layer0: small radius (about 1.5 cm), resolution of 10–15um in both coordinates, low material budget <1%X0, and the ability to withstand a background hit rate of several tens of MHz/cm2. Thanks to an intense R&D program the development of Deep NWell CMOS MAPS (with the ST Microelectronics 130 nm process) has reached a good level of maturity and allowed for the first time the implementation of thin CMOS sensors with similar functionalities as in hybrid pixels, such as pixel-level sparsification and fast time stamping. Further MAPS performance improvements are currently under investigation with two different approaches: the INMAPS CMOS process, featuring a quadruple well and a high resistivity substrate, and 3D CMOS MAPS, realized with vertical integration technology. In both cases specific features of the processes chosen can improve charge collection efficiency, with respect to a standard DNW MAPS design, and allow to implement a more complex in-pixel logic in order to develop a faster readout architecture. Prototypes of MAPS matrix, suitable for application in the SuperB Layer0, have been realized with the INMAPS 180 nm process and the 130 nm Chartered/Tezzaron 3D process and results of their characterization will be presented in this paper.
journal article - articolo
2013
Rizzo, Giuliana; Comotti, Daniele; Manghisoni, Massimo; Re, Valerio; Traversi, Gianluca; Fabbri, Laura; Gabrielli, Alessandro; Giorgi, Filippo; Pelleg...espandi
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10446/31275
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