Monolithic CMOS pixel sensors offer unprecedented opportunities for fast nano-imaging through direct electron detection in transmission electron microscopy. We present the design and a full characterisation of a CMOS pixel test structure able to withstand doses in excess of 1 Mrad. Data collected with electron beams at various energies of interest in electron microscopy are compared to predictions of simulation and to 1.5 GeV electron data to disentagle the effect of multiple scattering. The point spread function measured with 300 keV electrons is for pixel and for pixels, respectively, which agrees well with the values of 8.4 and predicted by our simulation.

(2009). A rad-hard CMOS active pixel sensor for electron microscopy [journal article - articolo]. In NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT. Retrieved from http://hdl.handle.net/10446/187034

A rad-hard CMOS active pixel sensor for electron microscopy

Mattiazzo, Serena;
2009-01-01

Abstract

Monolithic CMOS pixel sensors offer unprecedented opportunities for fast nano-imaging through direct electron detection in transmission electron microscopy. We present the design and a full characterisation of a CMOS pixel test structure able to withstand doses in excess of 1 Mrad. Data collected with electron beams at various energies of interest in electron microscopy are compared to predictions of simulation and to 1.5 GeV electron data to disentagle the effect of multiple scattering. The point spread function measured with 300 keV electrons is for pixel and for pixels, respectively, which agrees well with the values of 8.4 and predicted by our simulation.
articolo
2009
Battaglia, Marco; Contarato, Devis; Denes, P.; Doering, Dionisio; Giubilato, ; Tae, Sung; Kimb, ; Mattiazzo, Serena; Radmilovic, V.; Zalusky, S....espandi
(2009). A rad-hard CMOS active pixel sensor for electron microscopy [journal article - articolo]. In NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT. Retrieved from http://hdl.handle.net/10446/187034
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10446/187034
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